MEMS/NEMS Devices

BOOK-CHAPTER

Year: 2005 Pages: 267-302

DOI: 10.1007/1-4020-3016-9_9

Keywords:

Nanoelectromechanical systems Microelectromechanical systems Materials science Engineering Nanotechnology

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.28

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Geophysics and Sensor Technology

Physical Sciences → Engineering → Ocean Engineering