BOOK-CHAPTER

MEMS/NEMS Devices

Keywords:
Nanoelectromechanical systems Microelectromechanical systems Materials science Engineering Nanotechnology

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
17
Refs
0.28
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Geophysics and Sensor Technology
Physical Sciences →  Engineering →  Ocean Engineering
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