BOOK-CHAPTER
MEMS/NEMS Devices and Applications
Keywords:
Nanoelectromechanical systems Microelectromechanical systems Microfabrication Miniaturization Engineering Surface micromachining Modular design Nanotechnology Electronics Computer science Electrical engineering Electronic engineering Fabrication Materials science
Metrics
3
Cited By
0.00
FWCI (Field Weighted Citation Impact)
53
Refs
0.41
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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