JOURNAL ARTICLE
Ar+ laser-induced chemical etching of molybdenum in chlorine atmosphere
P. MogyorósiK. PiglmayerD. Bäuerle
Year: 1989 Journal: Surface Science Letters Vol: 208 (1-2)Pages: A8-A8 Publisher: Elsevier BV
Keywords:
Molybdenum Chlorine Atmosphere (unit) Etching (microfabrication) Laser Materials science Isotropic etching Environmental chemistry Chemistry Inorganic chemistry Metallurgy Nanotechnology Optics Meteorology Physics
Metrics
1
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.46
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Advanced Materials Characterization Techniques
Physical Sciences → Engineering → Biomedical Engineering
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Laser-induced spectroscopy and plasma
Physical Sciences → Engineering → Mechanics of Materials
Related Documents
JOURNAL ARTICLE
Ar+ laser-induced chemical etching of molybdenum in chlorine atmosphere
P. MogyorósiK. PiglmayerD. Bäuerle
Journal: Surface Science Year: 1989 Vol: 208 (1-2)Pages: 232-244
JOURNAL ARTICLE
Laser-induced chemical etching of silicon in chlorine atmosphere
Journal: Applied Physics A Year: 1987 Vol: 43 (3)Pages: 227-232
JOURNAL ARTICLE
Laser-induced chemical etching of silicon in chlorine atmosphere
Journal: Applied Physics A Year: 1988 Vol: 47 (4)Pages: 377-386
JOURNAL ARTICLE
Laser-induced chemical etching of silicon in chlorine atmosphere
P. Mogyor�siK. PiglmayerR. KullmerD. B�uerle
Journal: Applied Physics A Year: 1988 Vol: 45 (4)Pages: 293-299
JOURNAL ARTICLE
Laser-Induced Chemical Etching Of Silicon In Chlorine Atmosphere
Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Year: 1989 Vol: 1033 Pages: 232-232