JOURNAL ARTICLE
Ar+ laser-induced chemical etching of molybdenum in chlorine atmosphere
P. MogyorósiK. PiglmayerD. Bäuerle
Year: 1989 Journal: Surface Science Vol: 208 (1-2)Pages: 232-244 Publisher: Elsevier BV
Keywords:
Etching (microfabrication) Chlorine Atmosphere (unit) Molybdenum Isotropic etching Chemistry Laser Chemical reaction Molecule Inorganic chemistry Analytical Chemistry (journal) Materials science Optics Environmental chemistry Organic chemistry Thermodynamics
Metrics
15
Cited By
0.92
FWCI (Field Weighted Citation Impact)
10
Refs
0.73
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Advanced Materials Characterization Techniques
Physical Sciences → Engineering → Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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