Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography

Yanquan Geng; Yongda Yan

doi:10.1007/978-981-10-6588-0_13-2

ScienceGate Book Chapters

BOOK-CHAPTER

Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography

Yanquan Geng Yongda Yan

Year: 2018 Micro/Nano technologies Pages: 1-33 Publisher: Springer Nature

DOI: 10.1007/978-981-10-6588-0_13-2

Get Full-Text PDF Get Analytical Report

Keywords:

Nanostructure Fabrication Nanolithography Nanotechnology Materials science Machining Lithography Nanomanufacturing Atomic force microscopy Optoelectronics Metallurgy

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.46

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography

Metrics

Topics

Related Documents