BOOK-CHAPTER

Three-Dimensional Fabrication of Micro-/Nanostructure Using Scanning Probe Lithography

Yanquan GengYongda Yan

Year: 2018 Micro/Nano technologies Pages: 1-33   Publisher: Springer Nature
Keywords:
Nanostructure Fabrication Nanolithography Nanotechnology Materials science Machining Lithography Nanomanufacturing Atomic force microscopy Optoelectronics Metallurgy

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Topics

Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
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