Fabrication of VO<sub>2</sub> Hierarchical Micro-Nanostructure Arrays by Oxidation Scanning Probe Lithography

JOURNAL ARTICLE

Fabrication of VO₂ Hierarchical Micro-Nanostructure Arrays by Oxidation Scanning Probe Lithography

Year: 2024 Vol: 114 Pages: 250-254

DOI: 10.1109/edm61683.2024.10615063

Keywords:

Fabrication Nanostructure Lithography Materials science Nanotechnology Nanolithography Optoelectronics

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