JOURNAL ARTICLE
NANOMETER-SCALE FABRICATION USING SCANNING PROBE LITHOGRAPHY
M. IshibashiSeiji HeikeMidori KatoT. Hashizume
Year: 2002 Journal: Foundations of Quantum Mechanics in the Light of New Technology Pages: 215-218
Keywords:
Fabrication Lithography Nanometre Materials science Nanotechnology Scale (ratio) Optoelectronics Physics Composite material
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Topics
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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