JOURNAL ARTICLE

NANOMETER-SCALE FABRICATION USING SCANNING PROBE LITHOGRAPHY

M. IshibashiSeiji HeikeMidori KatoT. Hashizume

Year: 2002 Journal:   Foundations of Quantum Mechanics in the Light of New Technology Pages: 215-218
Keywords:
Fabrication Lithography Nanometre Materials science Nanotechnology Scale (ratio) Optoelectronics Physics Composite material

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Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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