BOOK-CHAPTER
Reactive high power impulse magnetron sputtering
Tomáš KubartJón Tómas GuðmundssonDaniel Lundin
Year: 2019 Elsevier eBooks Pages: 223-263 Publisher: Elsevier BV
Keywords:
High-power impulse magnetron sputtering Sputtering Materials science Hysteresis AC power Impulse (physics) Engineering physics Nanotechnology Sputter deposition Thin film Electrical engineering Engineering Physics Voltage
Metrics
14
Cited By
4.42
FWCI (Field Weighted Citation Impact)
116
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Plasma Diagnostics and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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