JOURNAL ARTICLE
Control of reactive high power impulse magnetron sputtering processes
M. AudronisV. Bellido-GonzálezB. Daniel
Year: 2009 Journal: Surface and Coatings Technology Vol: 204 (14)Pages: 2159-2164 Publisher: Elsevier BV
Keywords:
High-power impulse magnetron sputtering Materials science Sputtering Physical vapor deposition Coating Cavity magnetron Sputter deposition Optoelectronics Thin film Plasma Nanotechnology
Metrics
62
Cited By
8.48
FWCI (Field Weighted Citation Impact)
15
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
High-Temperature Coating Behaviors
Physical Sciences → Engineering → Aerospace Engineering
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