JOURNAL ARTICLE
Hysteresis-free reactive high power impulse magnetron sputtering
Year: 2007 Journal: Thin Solid Films Vol: 516 (18)Pages: 6398-6401 Publisher: Elsevier BV
Keywords:
High-power impulse magnetron sputtering Sputtering Hysteresis Materials science Impulse (physics) Sputter deposition Stoichiometry Analytical Chemistry (journal) Chemistry Optoelectronics Thin film Nanotechnology Condensed matter physics Physics Chromatography Physical chemistry
Metrics
140
Cited By
10.76
FWCI (Field Weighted Citation Impact)
12
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
High-Temperature Coating Behaviors
Physical Sciences → Engineering → Aerospace Engineering
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