JOURNAL ARTICLE

Hysteresis-free reactive high power impulse magnetron sputtering

Erik WallinUlf Helmersson

Year: 2007 Journal:   Thin Solid Films Vol: 516 (18)Pages: 6398-6401   Publisher: Elsevier BV
Keywords:
High-power impulse magnetron sputtering Sputtering Hysteresis Materials science Impulse (physics) Sputter deposition Stoichiometry Analytical Chemistry (journal) Chemistry Optoelectronics Thin film Nanotechnology Condensed matter physics Physics Chromatography Physical chemistry

Metrics

140
Cited By
10.76
FWCI (Field Weighted Citation Impact)
12
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
High-Temperature Coating Behaviors
Physical Sciences →  Engineering →  Aerospace Engineering

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