JOURNAL ARTICLE
Surface Morphology and Characteristics of LiNbO3Single Crystal by Helicon Wave Plasma Etching
Year: 2003 Journal: Journal of the Korean Ceramic Society Vol: 40 (9)Pages: 886-890 Publisher: Springer Science+Business Media
Keywords:
Helicon Materials science Morphology (biology) Etching (microfabrication) Plasma Single crystal Nanotechnology Crystallography Layer (electronics) Chemistry
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Topics
Photorefractive and Nonlinear Optics
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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