JOURNAL ARTICLE
Surface precipitates on single crystal LiNbO3 after dry-etching by CHF3 plasma
Kaori ShimaNaoki MitsugiHirotoshi Nagata
Year: 1998 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 13 (3)Pages: 527-529 Publisher: Springer Nature
Keywords:
Materials science X-ray photoelectron spectroscopy Auger electron spectroscopy Dry etching Amorphous solid Electron cyclotron resonance Precipitation Etching (microfabrication) Crystal (programming language) Plasma Single crystal Analytical Chemistry (journal) Crystallography Chemical engineering Nanotechnology
Metrics
17
Cited By
1.16
FWCI (Field Weighted Citation Impact)
6
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Photorefractive and Nonlinear Optics
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced Fiber Laser Technologies
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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