JOURNAL ARTICLE

Towards metal gate/high-k dielectric integration for high performance CMOS technology

Keywords:
Materials science CMOS Dielectric High-κ dielectric Metal gate Optoelectronics Gate dielectric Metal Engineering physics Electronic engineering Electrical engineering Gate oxide Metallurgy Transistor Voltage Engineering

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Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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