JOURNAL ARTICLE

CMOS Integration Issues with High-K/Metal Gate Stack

Dim‐Lee Kwong

Year: 2006 Journal:   ECS Meeting Abstracts Vol: MA2005-02 (13)Pages: 566-566   Publisher: Institute of Physics

Abstract

Abstract not Available.

Keywords:
CMOS Stack (abstract data type) Metal gate High-κ dielectric Materials science Computer science Electronic engineering Electrical engineering Optoelectronics Gate oxide Engineering Transistor Operating system

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Topics

Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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