BOOK-CHAPTER
New Sonic Cleaning Technology for Particle Removal from Semiconductor Surfaces
Keywords:
Semiconductor Reciprocity (cultural anthropology) Acoustics Particle (ecology) Semiconductor industry Engineering Materials science Electrical engineering Physics Manufacturing engineering
Metrics
4
Cited By
0.00
FWCI (Field Weighted Citation Impact)
8
Refs
0.00
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Aerosol Filtration and Electrostatic Precipitation
Physical Sciences → Engineering → Electrical and Electronic Engineering
Surface Modification and Superhydrophobicity
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
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