BOOK-CHAPTER

Particle Removal from Semiconductor Wafers Using Cleaning Solvents

Keywords:
Wafer Materials science Particle (ecology) Wet cleaning Semiconductor Silicon Acetone Semiconductor device fabrication Adhesion Ultrasonic sensor Chemical engineering Nanotechnology Composite material Optoelectronics Chemistry Organic chemistry

Metrics

6
Cited By
3.82
FWCI (Field Weighted Citation Impact)
17
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Recycling and Waste Management Techniques
Physical Sciences →  Environmental Science →  Industrial and Manufacturing Engineering
Industrial Vision Systems and Defect Detection
Physical Sciences →  Engineering →  Industrial and Manufacturing Engineering
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