Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform

Pierre Edinger; Kristofer Kristinsson; Carlos Errando-Herranz; Alain Yuji Takabayashi; Hamed Sattari; Niels Quack; Peter Verheyen; Wim Bogaerts; Kristinn B. Gylfason

doi:10.1364/cleo_si.2021.stu2q.1

JOURNAL ARTICLE

Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform

Pierre Edinger Kristofer Kristinsson Carlos Errando-Herranz Alain Yuji Takabayashi Hamed Sattari Niels Quack Peter Verheyen Wim Bogaerts Kristinn B. Gylfason

Year: 2021 Journal: Conference on Lasers and Electro-Optics Pages: STu2Q.1-STu2Q.1

DOI: 10.1364/cleo_si.2021.stu2q.1

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Abstract

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2 π phase shifter with a 1.54 μs time constant and 0.5 dB insertion loss in IMEC’s iSiPP50G platform.

Keywords:

Phase shift module Microelectromechanical systems Insertion loss Silicon photonics Photonics Constant (computer programming) Materials science Electrical engineering Foundry Silicon Phase (matter) Power (physics) Optoelectronics Engineering Electronic engineering Computer science Physics Mechanical engineering

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Neural Networks and Reservoir Computing

Physical Sciences → Computer Science → Artificial Intelligence

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Photonic Communication Systems

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform

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