JOURNAL ARTICLE
Silicon Photonic MEMS Phase Shifter Using Gradient Electric Force Actuation
Venkatesh DeenadayalanMatthew van NiekerkMichael L. FantoStefan F. Preble
Year: 2020 Journal: Frontiers in Optics / Laser Science Pages: FW5D.3-FW5D.3
Abstract
A foundry-compatible MEMs phase shifter for silicon photonic circuits that works with a low electro-static actuation voltage of 12V to produce an overall phase shift of 1.53π is presented in this paper.
Keywords:
Phase shift module Microelectromechanical systems Materials science Silicon Electronic circuit Optoelectronics Voltage Comb drive Photonics Silicon photonics Phase (matter) Optics Electrical engineering Fabrication Physics Engineering Insertion loss
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4
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0.45
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Citation History
Topics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Neural Networks and Reservoir Computing
Physical Sciences → Computer Science → Artificial Intelligence
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