Ultra-Low Voltage Silicon Photonic MEMS Phase Shifter

Venkatesh Deenadayalan; Michael L. Fanto; Matthew van Niekerk; Stefan F. Preble

doi:10.1109/ipc47351.2020.9252307

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Ultra-Low Voltage Silicon Photonic MEMS Phase Shifter

Venkatesh Deenadayalan Michael L. Fanto Matthew van Niekerk Stefan F. Preble

Year: 2020 Pages: 1-2

DOI: 10.1109/ipc47351.2020.9252307

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Abstract

We present the design and working model of an ultra-low voltage silicon photonic MEMs phase shifter that produces a 1.41π phase shift with only a 0.7V actuation voltage. This device is electrostatically driven and compatible with CMOS-silicon photonic foundries.

Keywords:

Phase shift module Microelectromechanical systems Silicon photonics Silicon Photonics Materials science Voltage Low voltage Optoelectronics CMOS Electrical engineering Engineering Insertion loss

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Neural Networks and Reservoir Computing

Physical Sciences → Computer Science → Artificial Intelligence

Ultra-Low Voltage Silicon Photonic MEMS Phase Shifter

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