Fabrication of high-aspect-ratio microstructures using SU8 photoresist

JOURNAL ARTICLE

Year: 2005 Journal: Microsystem Technologies Publisher: Springer Science+Business Media

Keywords:

Photoresist Fabrication Microstructure Materials science Aspect ratio (aeronautics) Nanotechnology Composite material

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Additive Manufacturing and 3D Printing Technologies

Physical Sciences → Engineering → Automotive Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering