JOURNAL ARTICLE

Fabrication of high-aspect-ratio microstructures using excimer laser

Ampere A. TsengYing-Tung ChenKung‐Jeng Ma

Year: 2003 Journal:   Optics and Lasers in Engineering Vol: 41 (6)Pages: 827-847   Publisher: Elsevier BV
Keywords:
Fluence Materials science Ablation Extrapolation Excimer laser Surface micromachining Laser ablation Optics Laser Aspect ratio (aeronautics) Microstructure Volume (thermodynamics) Fabrication Composite material

Metrics

69
Cited By
3.84
FWCI (Field Weighted Citation Impact)
14
Refs
0.93
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Ocular and Laser Science Research
Health Sciences →  Medicine →  Ophthalmology
Laser Design and Applications
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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