Fabrication of high-aspect-ratio microstructures using excimer laser

Ampere A. Tseng; Ying-Tung Chen; Kung‐Jeng Ma

doi:10.1016/s0143-8166(03)00062-9

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Fabrication of high-aspect-ratio microstructures using excimer laser

Ampere A. Tseng Ying-Tung Chen Kung‐Jeng Ma

Year: 2003 Journal: Optics and Lasers in Engineering Vol: 41 (6)Pages: 827-847 Publisher: Elsevier BV

DOI: 10.1016/s0143-8166(03)00062-9

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Keywords:

Fluence Materials science Ablation Extrapolation Excimer laser Surface micromachining Laser ablation Optics Laser Aspect ratio (aeronautics) Microstructure Volume (thermodynamics) Fabrication Composite material

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fabrication of high-aspect-ratio microstructures using excimer laser

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