Effects of Substrate Temperature on Heteroepitaxial Growth of 3C-SiC Thin Films by MBE on Si(111) Substrate

JOURNAL ARTICLE

Year: 2007 Journal: Journal of Inorganic Materials Vol: 22 (4) Publisher: Science Press

Keywords:

Materials science Substrate (aquarium) Optoelectronics Molecular beam epitaxy Thin film Epitaxy Nanotechnology Layer (electronics)

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Silicon Carbide Semiconductor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering