JOURNAL ARTICLE

Heteroepitaxial Growth of 3C-SiC(111)on Si(110) Substrate Using Monomethylsilane

Atsushi KonnoYuzuru NaritaTakashi ItohKanji YasuiHideki NakzawaTetsuo EndohMaki Suemitsu

Year: 2006 Journal:   ECS Meeting Abstracts Vol: MA2006-02 (28)Pages: 1303-1303   Publisher: Institute of Physics

Abstract

Abstract not Available.

Keywords:
Materials science Substrate (aquarium) Optoelectronics Silicon carbide Engineering physics Nanotechnology Metallurgy Engineering Geology

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Topics

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Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
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