JOURNAL ARTICLE

Determination of the oxygen content in amorphous SiOx thin films

Keywords:
Suboxide Analytical Chemistry (journal) Infrared spectroscopy Amorphous solid Materials science Amorphous silicon Silicon Spectroscopy Fourier transform infrared spectroscopy Chemical vapor deposition Thin film Chemistry Crystallography Crystalline silicon Optics Nanotechnology Optoelectronics

Metrics

31
Cited By
2.28
FWCI (Field Weighted Citation Impact)
60
Refs
0.89
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Glass properties and applications
Physical Sciences →  Materials Science →  Ceramics and Composites
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