Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow

Junjie Zhu; Mujun Li; Jinfeng Qiu; Huichun Ye

doi:10.1007/s00542-018-4226-2

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Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow

Junjie Zhu Mujun Li Jinfeng Qiu Huichun Ye

Year: 2018 Journal: Microsystem Technologies Vol: 25 (4)Pages: 1235-1241 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-018-4226-2

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Keywords:

Microlens Materials science Fabrication Lithography Optics Digital micromirror device Surface roughness Optoelectronics Nanotechnology Lens (geology) Physics Composite material

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Advanced optical system design

Physical Sciences → Engineering → Biomedical Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow

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