Fabrication of high fill-factor microlens array using spatially constrained thermal reflow

Jinfeng Qiu; Mujun Li; Huichun Ye; Junjie Zhu; Chao Ji

doi:10.1016/j.sna.2018.05.039

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Fabrication of high fill-factor microlens array using spatially constrained thermal reflow

Jinfeng Qiu Mujun Li Huichun Ye Junjie Zhu Chao Ji

Year: 2018 Journal: Sensors and Actuators A Physical Vol: 279 Pages: 17-26 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2018.05.039

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Keywords:

Microlens Polydimethylsiloxane Materials science Process (computing) Thermal Fabrication Mold Shape factor Computer science Optics Lens (geology) Nanotechnology Composite material Physics

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Advanced optical system design

Physical Sciences → Engineering → Biomedical Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Adaptive optics and wavefront sensing

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Fabrication of high fill-factor microlens array using spatially constrained thermal reflow

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