Fabrication of high fill-factor aspheric microlens array by digital maskless lithography

Kejun Zhong; Hailin Zhang; Yiqing Gao

doi:10.1016/j.ijleo.2017.05.069

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Fabrication of high fill-factor aspheric microlens array by digital maskless lithography

Kejun Zhong Hailin Zhang Yiqing Gao

Year: 2017 Journal: Optik Vol: 142 Pages: 243-248 Publisher: Elsevier BV

DOI: 10.1016/j.ijleo.2017.05.069

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Keywords:

Microlens Materials science Lithography Optics Maskless lithography Digital micromirror device Fabrication Wafer Photomask Hexagonal crystal system Optoelectronics Electron-beam lithography Resist Nanotechnology Physics Lens (geology)

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Advanced optical system design

Physical Sciences → Engineering → Biomedical Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fabrication of high fill-factor aspheric microlens array by digital maskless lithography

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