Fabrication of a curved microlens array using double gray-scale digital maskless lithography

Ningning Luo; Zhimin Zhang

doi:10.1088/1361-6439/aa596a

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Fabrication of a curved microlens array using double gray-scale digital maskless lithography

Ningning Luo Zhimin Zhang

Year: 2017 Journal: Journal of Micromechanics and Microengineering Vol: 27 (3)Pages: 035015-035015 Publisher: IOP Publishing

DOI: 10.1088/1361-6439/aa596a

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Keywords:

Microlens Fabrication Lithography Maskless lithography Materials science Optics Optoelectronics Nanotechnology Electron-beam lithography Physics Resist Medicine Lens (geology)

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Advanced optical system design

Physical Sciences → Engineering → Biomedical Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of a curved microlens array using double gray-scale digital maskless lithography

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