JOURNAL ARTICLE

Fabrication of a curved microlens array using double gray-scale digital maskless lithography

Ningning LuoZhimin Zhang

Year: 2017 Journal:   Journal of Micromechanics and Microengineering Vol: 27 (3)Pages: 035015-035015   Publisher: IOP Publishing
Keywords:
Microlens Fabrication Lithography Maskless lithography Materials science Optics Optoelectronics Nanotechnology Electron-beam lithography Physics Resist Medicine Lens (geology)

Metrics

23
Cited By
1.11
FWCI (Field Weighted Citation Impact)
24
Refs
0.73
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced optical system design
Physical Sciences →  Engineering →  Biomedical Engineering
Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
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