JOURNAL ARTICLE

Room-temperature fabrication of a Ga-Sn-O thin-film transistor

Tokiyoshi MatsudaRyo TakagiKenta UmedaMutsumi Kimura

Year: 2017 Journal:   Solid-State Electronics Vol: 134 Pages: 19-21   Publisher: Elsevier BV
Keywords:
Sputtering Sputter deposition Materials science Thin-film transistor Optoelectronics Annealing (glass) Amorphous solid Fabrication Thin film Transistor Semiconductor Cavity magnetron Metallurgy Nanotechnology Electrical engineering Chemistry Crystallography Voltage Layer (electronics)

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11
Cited By
0.53
FWCI (Field Weighted Citation Impact)
3
Refs
0.69
Citation Normalized Percentile
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Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences →  Materials Science →  Polymers and Plastics
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
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