Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication

Fabian Patrovsky; Vera Fiehler; Susan Derenko; S. Barth; Hagen Bartzsch; Katrin Ortstein; Peter Frach; Lukas M. Eng

doi:10.1088/2053-1591/aa6e62

ScienceGate Book Chapters

JOURNAL ARTICLE

Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication

Fabian Patrovsky Vera Fiehler Susan Derenko S. Barth Hagen Bartzsch Katrin Ortstein Peter Frach Lukas M. Eng

Year: 2017 Journal: Materials Research Express Vol: 4 (5)Pages: 055010-055010 Publisher: IOP Publishing

DOI: 10.1088/2053-1591/aa6e62

Get Full-Text PDF Get Analytical Report

Abstract

Art. 055010, 11 S.

Keywords:

Nanorod Fabrication Materials science Anodizing Plasmon Nanotechnology Thin film Sputter deposition Optoelectronics Nanostructure Surface plasmon resonance Sputtering Aluminium Nanoparticle Composite material

Metrics

Cited By

0.35

FWCI (Field Weighted Citation Impact)

Refs

0.52

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Anodic Oxide Films and Nanostructures

Physical Sciences → Materials Science → Materials Chemistry

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication

Abstract

Metrics

Citation History

Topics

Related Documents

Improved Oxide Properties by Anodization of Aluminum Films with Thin Sputtered Aluminum Oxide Overlays

ChemInform Abstract: Improved Oxide Properties by Anodization of Aluminum Films with Thin Sputtered Aluminum Oxide Overlays.

Fabrication of anodic aluminum oxide nanotemplate using sputtered aluminum thin film

Electrical properties of thin rf sputtered aluminum oxide films

Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays