JOURNAL ARTICLE
ChemInform Abstract: Improved Oxide Properties by Anodization of Aluminum Films with Thin Sputtered Aluminum Oxide Overlays.
Year: 1989 Journal: ChemInform Vol: 20 (5) Publisher: Wiley
Abstract
Abstract The dielectric, electrical, and structural properties of oxide films prepared by anodization of Al films which are covered with thin sputtered aluminum oxide layers are compared with oxide films fabricated by either anodization or sputtering.
Keywords:
Anodizing Oxide Aluminum oxide Aluminium Chemistry Thin film Sputtering Dielectric Chemical engineering Nanotechnology Metallurgy Materials science Optoelectronics Organic chemistry
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Topics
Anodic Oxide Films and Nanostructures
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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