Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging

Elena Alonso-Redondo; Abdellatif Gueddida; Jih‐Heng Li; Bartłomiej Graczykowski; Yan Pennec; Shu Yang; Bahram Djafari‐Rouhani; G. Fytas

doi:10.1039/c6nr08312a

JOURNAL ARTICLE

Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging

Elena Alonso-Redondo Abdellatif Gueddida Jih‐Heng Li Bartłomiej Graczykowski Yan Pennec Yan Pennec Shu Yang Bahram Djafari‐Rouhani G. Fytas

Year: 2017 Journal: Nanoscale Vol: 9 (8)Pages: 2739-2747 Publisher: Royal Society of Chemistry

DOI: 10.1039/c6nr08312a

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Abstract

Directional elastic wave propagation in high-aspect-ratio photoresist gratings is assessed by Brillouin spectroscopy in two cases: liquid infiltration and aging.

Keywords:

Photoresist Materials science Infiltration (HVAC) Brillouin Spectroscopy Aspect ratio (aeronautics) Brillouin scattering Brillouin zone Optics Composite material Optical fiber Physics

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Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Near-Field Optical Microscopy

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging

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