JOURNAL ARTICLE
High aspect ratio optical gratings in diamond
Pontus ForsbergMikael Karlsson
Year: 2013 Journal: Diamond and Related Materials Vol: 34 Pages: 19-24 Publisher: Elsevier BV
Keywords:
Materials science Diamond Optics Nanoimprint lithography Etching (microfabrication) Lithography Optoelectronics Aspect ratio (aeronautics) Nanolithography Laser Wavelength Electron-beam lithography Fabrication Resist Nanotechnology Composite material
Metrics
83
Cited By
2.05
FWCI (Field Weighted Citation Impact)
25
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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