Lumped element modeling of air-coupled capacitive micromachined ultrasonic transducers with annular cell geometry

Shuai Na; Lawrence L. P. Wong; Albert I. H. Chen; Zhenhao Li; Mirek Macecek; John T. W. Yeow

doi:10.1016/j.ultras.2016.11.014

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Lumped element modeling of air-coupled capacitive micromachined ultrasonic transducers with annular cell geometry

Shuai Na Lawrence L. P. Wong Albert I. H. Chen Zhenhao Li Mirek Macecek John T. W. Yeow

Year: 2016 Journal: Ultrasonics Vol: 76 Pages: 19-27 Publisher: Elsevier BV

DOI: 10.1016/j.ultras.2016.11.014

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Keywords:

Capacitive micromachined ultrasonic transducers Acoustics Ultrasonic sensor Transducer Capacitive sensing Finite element method Displacement (psychology) Materials science Computer science Physics Structural engineering Engineering

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Ultrasound Imaging and Elastography

Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging

Ultrasonics and Acoustic Wave Propagation

Physical Sciences → Engineering → Mechanics of Materials

Acoustic Wave Phenomena Research

Physical Sciences → Engineering → Biomedical Engineering

Lumped element modeling of air-coupled capacitive micromachined ultrasonic transducers with annular cell geometry

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