JOURNAL ARTICLE

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

Keywords:
Capacitive micromachined ultrasonic transducers Capacitive sensing Transducer Acoustics Resonator Materials science Ultrasonic sensor Microelectromechanical systems Sound pressure Bandwidth (computing) Helmholtz resonator Resonance (particle physics) Optoelectronics Electrical engineering Physics Computer science Engineering Telecommunications

Metrics

14
Cited By
0.71
FWCI (Field Weighted Citation Impact)
23
Refs
0.76
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ultrasound Imaging and Elastography
Health Sciences →  Medicine →  Radiology, Nuclear Medicine and Imaging
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering

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