Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

Alberto Octavio Manzanares; F. Montero de Espinosa

doi:10.1016/j.ultras.2011.10.011

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Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

Alberto Octavio Manzanares F. Montero de Espinosa

Year: 2011 Journal: Ultrasonics Vol: 52 (4)Pages: 482-489 Publisher: Elsevier BV

DOI: 10.1016/j.ultras.2011.10.011

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Keywords:

Capacitive micromachined ultrasonic transducers Capacitive sensing Transducer Acoustics Resonator Materials science Ultrasonic sensor Microelectromechanical systems Sound pressure Bandwidth (computing) Helmholtz resonator Resonance (particle physics) Optoelectronics Electrical engineering Physics Computer science Engineering Telecommunications

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ultrasound Imaging and Elastography

Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

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