JOURNAL ARTICLE

Lumped Electromechanical Modeling of Capacitive Micromachined Ultrasonic Transducers

Keywords:
Capacitive micromachined ultrasonic transducers Materials science Acoustics Capacitive sensing Ultrasonic sensor Surface micromachining Finite element method Capacitance Displacement (psychology) Biasing Voltage Transducer Piezoelectricity Electrode Engineering Electrical engineering Structural engineering Composite material

Metrics

2
Cited By
0.26
FWCI (Field Weighted Citation Impact)
10
Refs
0.60
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Ultrasonics and Acoustic Wave Propagation
Physical Sciences →  Engineering →  Mechanics of Materials
Ultrasound Imaging and Elastography
Health Sciences →  Medicine →  Radiology, Nuclear Medicine and Imaging
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering

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