Comprehensive optimization of pid-type closed-loop MEMS accelerometer system
Mingjun MaZhonghe JinShichang HuHuijie ZhuZhongyi ZhuYidong Liu
Abstract
The paper introduces specific ways of optimizing Proportional-Integral-Derivative (PID) type closed-loop Microelectromechanical System (MEMS) accelerometer system performance under fixed boundaries. Parameters tuning is applied to enhancing loop gain, under which configuration the tested Total Noise Equivalent Acceleration (TNEA) is around 3.2ug-√Hz @10Hz with bandwidth over 200Hz. This result is approaching this system's performance limit.
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