Optimization and analysis of a closed-loop MEMS accelerometer with enhanced bandwidth

Abstract

A displacement amplifier with curved and inclined beam configuration has been optimized to enhance the natural frequency of MEMS accelerometer. A regression algorithm has been used to predict the natural frequency and sensitivity of displacement amplifier-based MEMS accelerometers. Based on the established relationship, the optimization of geometrical parameters could provide a MEMS accelerometer with a more than 15 % increase in the input signal bandwidth. A switched capacitor-based signal conditioning circuit has been utilized to generate voltage output, and the influence of nonlinearity within the circuit on the closed-loop and open-loop MEMS accelerometer has been analyzed. Using the closed-loop control approach, the measurement range has been increased from ± 6g to ± 30g.