Growth Kinetics of Si and SiGe on Si [100], Si [110] and Si [111] Surfaces

JOURNAL ARTICLE

Year: 2006 Journal: 2006 International SiGe Technology and Device Meeting Pages: 1-2

DOI: 10.1109/istdm.2006.1662625

Keywords:

Kinetics Silicon Materials science Optoelectronics Physics

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