JOURNAL ARTICLE
Pyroelectric Si-monolithic Sensor Using PbTiO3 Thin Film
Keywords:
Pyroelectricity Materials science Optoelectronics Thin film Nanotechnology Ferroelectricity Dielectric
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Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
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