Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

Masanori Okuyama; Kohzo Ohtani; Toshiyuki Ueda; Yoshihiro Hamakawa

doi:10.1007/bf01014414

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Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

Masanori Okuyama Kohzo Ohtani Toshiyuki Ueda Yoshihiro Hamakawa

Year: 1985 Journal: International Journal of Infrared and Millimeter Waves Vol: 6 (1)Pages: 71-78 Publisher: Springer Science+Business Media

DOI: 10.1007/bf01014414

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Keywords:

Pyroelectricity Materials science Infrared Optoelectronics Thin film Classical electromagnetism Optics Dielectric Nanotechnology Ferroelectricity Physics

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Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

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