JOURNAL ARTICLE
Micromechanical three-axial tactile force sensor for micromaterial characterisation
Sebastian BütefischS. BüttgenbachT. Kleine-BestenUwe Brand
Year: 2001 Journal: Microsystem Technologies Vol: 7 (4)Pages: 171-174 Publisher: Springer Science+Business Media
Keywords:
Tactile sensor Metrology Surface micromachining Dimensional metrology Spring (device) Materials science Microelectromechanical systems Acoustics Mechanical engineering Computer science Engineering Nanotechnology Optics Physics Artificial intelligence Fabrication
Metrics
53
Cited By
0.73
FWCI (Field Weighted Citation Impact)
0
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced machining processes and optimization
Physical Sciences → Engineering → Mechanical Engineering
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