JOURNAL ARTICLE

Fabrication of Hollow High Aspect Ratio Metal Microstructure Arrays

Keywords:
Photoresist Materials science Resist Microstructure Fabrication Lithography Aspect ratio (aeronautics) Deposition (geology) Substrate (aquarium) Composite material Characterization (materials science) Metal Nanotechnology Optics Optoelectronics Metallurgy Layer (electronics)

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6
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0.28
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Topics

Polydiacetylene-based materials and applications
Physical Sciences →  Chemistry →  Organic Chemistry
Photonic Crystals and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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