Fabrication of High Aspect Ratio Microscale Rod Arrays Using Metal Injection Molding

Abstract

In this work, micro rod arrays of 50 um and 200 um in diameter, respectively, were fabricated by 316L metal injection molding. Acryl sacrificial mold was used for the 50 um rod array. Aspect ratios were about 8 and 6 in 50 um and 200 um rod arrays, respectively and the bending of the rods occured due to high aspect ratio in debinding and sintering steps. Also, severe grain growth occurred at rod surface by sintering for 3 hrs at 1300°C and the average size was measured to be about 70 um.