JOURNAL ARTICLE

Ion-beam doping during molecular beam epitaxy

Scott A. BarnettJ. E. GreeneJ.‐E. Sundgren

Year: 1989 Journal:   JOM Vol: 41 (4)Pages: 16-19   Publisher: Springer Science+Business Media
Keywords:
Molecular beam epitaxy Dopant Materials science Doping Optoelectronics Ion beam Epitaxy Semiconductor Atomic units Semiconductor device Ion Beam (structure) Nanotechnology Optics Chemistry Physics

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FWCI (Field Weighted Citation Impact)
22
Refs
0.30
Citation Normalized Percentile
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Topics

Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
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