JOURNAL ARTICLE
Ion-beam doping during molecular beam epitaxy
Scott A. BarnettJ. E. GreeneJ.‐E. Sundgren
Year: 1989 Journal: JOM Vol: 41 (4)Pages: 16-19 Publisher: Springer Science+Business Media
Keywords:
Molecular beam epitaxy Dopant Materials science Doping Optoelectronics Ion beam Epitaxy Semiconductor Atomic units Semiconductor device Ion Beam (structure) Nanotechnology Optics Chemistry Physics
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1
Cited By
0.00
FWCI (Field Weighted Citation Impact)
22
Refs
0.30
Citation Normalized Percentile
Is in top 1%
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Topics
Ion-surface interactions and analysis
Physical Sciences → Engineering → Computational Mechanics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences → Engineering → Electrical and Electronic Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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