Fine Grain Diamond Film Synthesis Using Pulse Microwave Plasma CVD.

Yukihiro Sakamoto; Koji USHIKUBO; Matsufumi TAKAYA

doi:10.4139/sfj.47.548

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Fine Grain Diamond Film Synthesis Using Pulse Microwave Plasma CVD.

Yukihiro Sakamoto Koji USHIKUBO Matsufumi TAKAYA

Year: 1996 Journal: Journal of The Surface Finishing Society of Japan Vol: 47 (6)Pages: 548-549 Publisher: The Surface Finishing Society of Japan

DOI: 10.4139/sfj.47.548

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Keywords:

Materials science Microwave Diamond Optoelectronics Plasma Pulse (music) Ion source Nanotechnology Metallurgy Electrical engineering Computer science Engineering Telecommunications Physics

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Fine Grain Diamond Film Synthesis Using Pulse Microwave Plasma CVD.

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