JOURNAL ARTICLE

Plasma CVD reactor with two-microwave oscillators for diamond film synthesis

Masaaki NagatsuMasato MiyakeJunpei Maeda

Year: 2005 Journal:   Thin Solid Films Vol: 506-507 Pages: 617-621   Publisher: Elsevier BV
Keywords:
Microwave Plasma Diamond Materials science Optoelectronics Chemical vapor deposition Carbon film Thin film Nanotechnology Physics Computer science Metallurgy Nuclear physics Telecommunications

Metrics

5
Cited By
0.00
FWCI (Field Weighted Citation Impact)
7
Refs
0.10
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

JOURNAL ARTICLE

Novel microwave plasma reactor for diamond synthesis

M. FünerC. WildP. Koidl

Journal:   Applied Physics Letters Year: 1998 Vol: 72 (10)Pages: 1149-1151
JOURNAL ARTICLE

Numerical optimization of hydrogen microwave plasma reactor for diamond film deposition

M. Yu. HrebtovM. S. Bobrov

Journal:   Journal of Physics Conference Series Year: 2019 Vol: 1382 (1)Pages: 012010-012010
JOURNAL ARTICLE

A compact ellipsoidal cavity type microwave plasma reactor for diamond film deposition

X.J. LiWeizhong TangF.Y. WangCongju LiL.F. HeiFan Lu

Journal:   Diamond and Related Materials Year: 2011 Vol: 20 (3)Pages: 374-379
© 2026 ScienceGate Book Chapters — All rights reserved.