Plasma CVD reactor with two-microwave oscillators for diamond film synthesis

Masaaki Nagatsu; Masato Miyake; Junpei Maeda

doi:10.1016/j.tsf.2005.08.041

ScienceGate Book Chapters

JOURNAL ARTICLE

Plasma CVD reactor with two-microwave oscillators for diamond film synthesis

Masaaki Nagatsu Masato Miyake Junpei Maeda

Year: 2005 Journal: Thin Solid Films Vol: 506-507 Pages: 617-621 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2005.08.041

Get Full-Text PDF Get Analytical Report

Keywords:

Microwave Plasma Diamond Materials science Optoelectronics Chemical vapor deposition Carbon film Thin film Nanotechnology Physics Computer science Metallurgy Nuclear physics Telecommunications

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.10

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Plasma CVD reactor with two-microwave oscillators for diamond film synthesis

Metrics

Citation History

Topics

Related Documents

Novel microwave plasma reactor for diamond synthesis

Numerical optimization of hydrogen microwave plasma reactor for diamond film deposition

Simulation-Based Development of a New Cylindrical-Cavity Microwave-Plasma Reactor for Diamond-Film Synthesis

A compact ellipsoidal cavity type microwave plasma reactor for diamond film deposition

Microwave plasma reactor with conical-reflector for diamond deposition