Synthesis of Diamond Film on Oxidized Chromium Substrate Using Microwave Plasma CVD.

Hideyuki Saitoh; Sumiko YAGI; Masato Yoshida; Akira Sakai; Toshihei Misawa; Toshiaki Tanaka; Hideaki Sohma; Hirohisa Tanaka

doi:10.4139/sfj.47.979

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Synthesis of Diamond Film on Oxidized Chromium Substrate Using Microwave Plasma CVD.

Hideyuki Saitoh Sumiko YAGI Masato Yoshida Akira Sakai Toshihei Misawa Toshiaki Tanaka Hideaki Sohma Hirohisa Tanaka

Year: 1996 Journal: Journal of The Surface Finishing Society of Japan Vol: 47 (11)Pages: 979-980 Publisher: The Surface Finishing Society of Japan

DOI: 10.4139/sfj.47.979

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Keywords:

Materials science Substrate (aquarium) Microwave Chromium Plasma Diamond Metallurgy Optoelectronics Computer science

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Synthesis of Diamond Film on Oxidized Chromium Substrate Using Microwave Plasma CVD.

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