Transparent conductive ITZO films deposited by a magnetron co-sputtering system using two cathodes

Yong-Min Kang

doi:10.3938/jkps.55.1901

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Transparent conductive ITZO films deposited by a magnetron co-sputtering system using two cathodes

Yong-Min Kang

Year: 2009 Journal: Journal of the Korean Physical Society Vol: 55 (5(1))Pages: 1901-1905 Publisher: Springer Science+Business Media

DOI: 10.3938/jkps.55.1901

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Keywords:

Materials science Sputter deposition Cathode Electrical conductor Sputtering High-power impulse magnetron sputtering Optoelectronics Cavity magnetron Engineering physics Nanotechnology Thin film Composite material Physics Electrical engineering

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical and Acousto-Optic Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Transparent conductive ITZO films deposited by a magnetron co-sputtering system using two cathodes

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