JOURNAL ARTICLE

N-Channel and P-Channel LPCVD Polysilicon Mosfet's and Effects of Grain Boundary Passivation

Keywords:
Passivation Materials science Polysilicon depletion effect MOSFET Grain boundary Optoelectronics Chemical vapor deposition Short-channel effect Channel (broadcasting) Leakage (economics) Engineering physics Electrical engineering Layer (electronics) Metallurgy Nanotechnology Transistor Microstructure Gate oxide Voltage Engineering

Metrics

11
Cited By
2.39
FWCI (Field Weighted Citation Impact)
10
Refs
0.90
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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